1. Equipment Name and Model:
BF220-17NH High-Temperature Atmosphere Bell Furnace
2. Application Field:
Primarily used for high-temperature co-firing processes of alumina substrates and metal pastes (HTCC) under nitrogen-hydrogen atmosphere.
3. Technical Specifications and Basic Configuration
- 3.1 Rated Temperature: 1600°C
- 3.2 Maximum Temperature: 1650°C
- 3.3 Effective Size: Φ750×500
- 3.4 Heating Element: Molybdenum heater
- 3.5 Process Atmosphere: Nitrogen/Hydrogen; one nitrogen line, one hydrogen line, with the option to humidify the mixed gas after nitrogen-hydrogen mixing.
- 3.6 Hydrogen Supply Conditions: Hydrogen cannot be supplied if the oxygen content exceeds 20ppm; if the oxygen content exceeds 20ppm during hydrogen supply, the hydrogen supply is automatically cut off.
- 3.7 Humidification Water Temperature: ≤80°C
- 3.8 Dew Point Range: -20 to 60°C
- 3.9 Temperature Control Stability: ±1°C, with PID auto-tuning function.
- 3.10 Temperature Uniformity: Better than ±5°C (tested at 1600°C for 2 hours in an empty furnace).
- 3.11 Temperature Control Thermocouple: Type B
- 3.12 Temperature Control Points: Three independent heating zones from top to bottom, with three independent temperature control points.
- 3.13 Temperature Control Segments: 19×19 segments
- 3.14 Cooling Method: External water cooling, with three water cooling zones: upper, middle, and lower.
- 3.15 Pressure Monitoring: Pressure transmitter for real-time monitoring of furnace pressure.
- 3.16 Pressure Range: 5000~15000Pa
- 3.17 Vacuum Detection: Vacuum gauge for detecting furnace vacuum level, with digital vacuum gauge displaying the vacuum value.
- 3.18 Explosion Protection: Automatic opening of the exhaust valve when furnace pressure exceeds the set value.
- 3.19 Exhaust Chimney: One exhaust port with an ignition device.
- 3.20 Alarm Protection: Alarms for over-temperature, thermocouple break, leakage, heater break, motor overload, low water level in the humidifier, low pressure, low cooling water pressure, and UPS activation, with over-temperature alarm and power-off protection.
- 3.21 Maximum Heating Power: 120kW
- 3.22 Idle Furnace Insulation Power: ≤60kW
- 3.23 Heating Rate: RT~1200ºC ≤5ºC/min, 1200~1600ºC ≤3ºC/min
- 3.24 Surface Temperature Rise: <35ºC
- 3.25 External Reference Dimensions: 2240×2900×3000mm (W×H×D, excluding control cabinet), subject to final product specifications.
4. Delivery List
| Table 1 Delivery list |
| |
Item |
Note |
Qty. |
| Basic Components |
Furnace |
|
1 SET |
| Inspection Certificates |
Certificates of major outsourced components |
1 SET |
| Technical Documents |
Instructions, technical documents of the major outsourced parts, etc |
1 SET |
| Key Components |
Molybdenum wire |
Custom-made |
1 SET |
| Mass Flow Meter |
Azbil or HORIBA |
1 SET |
| Thermocouple |
Song Qi |
1 SET |
| micro-oxygen analyzer |
|
1 SET |
| Temperature Control Module |
Azbil |
3 SET |
| Vacuum Pump |
|
1 SET |
| Dew Point Transmitter |
|
1 SET |
| Touch Screen |
MCGS |
1 SET |
| Spare Parts |
Heater |
|
1 PC |
5.Normal Operating Conditions
- Environmental Conditions: The equipment must be installed indoors, with a temperature range of 0~40ºC, humidity ≤80%RH, no corrosive gases, and no strong airflow disturbances.
- Water Supply Conditions: 0.1~0.3Mpa, clean and non-corrosive, with a supply flow rate of approximately 50L/min.
- Ventilation System: Non-contact connection to the user's exhaust system, with an exhaust capacity greater than 15m³/h.
- Floor Requirements: Level, with no significant vibrations, and a load-bearing capacity >500kg/m².
- Power Conditions: Capacity greater than 160kVA, 3-phase 5-wire, voltage 220/380V, frequency 50Hz. Live wires: yellow, green, red; neutral wire: blue; ground wire: yellow-green.
- Installation Site: 4500mm×3500mm×4500mm (W×H×D), with an installation area greater than 18m².
- Equipment Grounding: The equipment must be reliably grounded.
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