Mbf100-10 Type Chemical Vapor Deposition (CVD) Furnace 1000º C Melting Furnace Heating Furnace

• Customization: Available
• Certification: ISO
• Place Style: Vertical
• Model NO.: MBF100-10
• Range of Applications: Industrial
• Type: Electric Holding Furnace
• Usage: Ceramic Sintering
• Fuel: Electric
• Atmosphere: Nitrogen
• Effective Chamber Dimensions: 640*640*250mm(W*H*D)
• Transport Package: Wooden Packaging
• Specification: 1200*1200*1500mm
• Trademark: Chitherm
• Origin: China
• HS Code: 8514101000
• Production Capacity: 50 Sets/Year

Product Description

1.Equipment Name and Model: MBF100-10 Type Chemical Vapor Deposition Furnace.

The MBF100-10 Type Chemical Vapor Deposition (CVD) Furnace is suitable for medium-temperature heat treatment of electronic products. It is primarily used for gas-phase reaction processes of related materials in atmospheres of nitrogen, helium, acetylene, and hydrogen. It can also be utilized for sintering processes of related materials under protective atmospheres.

2.Technical Specifications and Basic Configuration

1. Rated Temperature: 750°C
2. Maximum Temperature: 1000°C
3. Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
4. Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
5. Outer Chamber Material: SUS310S
6. Inner Liner Material: Fused Quartz
7. Product Size: Φ120
8. Equipment Capacity: 16 substrates per batch
9. Maximum Heating Power: 16 kW
10. Heating Method: Bottom + Four Sides .
11. Temperature Control Points: Bottom + Side.l
12. Thermocouple Type: K-Type
13. Heating Rate: ≤8°C/min
14. Heating Elements: FEC Ceramic Fiber Heaters
15. Furnace Door Opening Method: Top-Opening Design
16. Temperature Control Stability: ±1°C
17. Temperature Control Instrument: Imported PID Controller with Auto-Tuning Function
18. Program Steps: 20 steps
19. Alarm and Protection: Over-temperature, thermocouple breakage, and other audible/visual alarms, with over-temperature power-off protection.
20. Surface Temperature Rise: <35ºC.
21. Weight: about 500kg.
22. Furnace Dimensions: about 1200×1200×1500mm (W×H×D).

3. Delivery List
	Item	Note	QTY
Basic Compositions	Furnace		1 unit
	Certificates of Inspection	Furnace and major purchased components	1 Set
	Technical Documents	Furnace specifications, technical documents of major purchased components, etc	1 Set
Key Parts	Mass Flow Controller (MFC)	Yamatake or HORIBA	4 Set
	Touch screen		1 PC
	Temperature Controller		1 Set
	FEC Heater		1 Set
	Quartz Liner		1 Set
Spares	SSR		1 PC

4. Facility Requirements
4.1 Environmental conditions: Temperature 0 - 40ºC, humidity ≤ 80% RH, no corrosive gas, no strong
airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m² .
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V, frequency
50Hz(according to local situation). Live wire: yellow, green, red, neutral wire: blue, ground wire: yellow-green;
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than 2.5m².