Typical applications:
The sintering and annealing process of electronic components, semiconductor wafers, and other related materials in a vacuum environment.
Parameter characteristics:
1. Rated Temp: 500 ºC
2. Max Temp: 700 ºC
3. Tube Material: Fused Silica
4. Effective Dimensions: Ø250 × 500mm (D × H);
5. Temp Uniformity: ± 2 ºC
6. Temp Zones: 3 Zones
7. Temp Zone Length: 300+300+300mm
8. Heat Power: 24kW
9. Insulation Power: ≤8kW
10. Heating up Speed: ≤15ºC/min
11. Thermocouple:Type K
12. Process Steps: 9 Steps
13. Max Vacuum Level: 5 × 10-4Pa
14. Working Vacuum Level: 1 × 10-3Pa
15. Vacuum Speed: ≤60min (up to 5 × 10-4Pa)
16. Alarms: Over temperature, vacuum level, gas air pressure, motor overload, and power lines reversed etc
17. Furnace Dimensions: 1200mm×1700mm×2200mm(W×H×D)
Delivery Checklist
|
Name |
Main Contents |
Quantity |
Basic Components
|
Furnace Main Unit |
|
1 unit |
Inspection Certificate |
Certificates for Major Purchased Components |
1 set |
Technical Documents |
Manual; Technical documents for major purchased components |
1 set |
Key Components |
Heating Element |
Customized |
1 piece |
Rotary Vane Vacuum Pump |
4L/s BaoSi DRV16 |
1 set
|
Quartz Tube |
Customized |
1 unit |
Vacuum Flange |
Customized |
1 set |
Touch Screen |
Kunlun Tongtai TPC1071Gn |
1 unit |
Temperature Control Module |
Yamatake NX-D15 |
1 unit |
Molecular Pump |
600L/s FF-160/620 |
1 unit |
Compound Vacuum Gauge |
Ruibao ZDF-5227AZ |
1 set |
Spare Parts |
Solid State Relay |
|
1 piece |
Operating conditions
1 .Environmental Conditions: Temperature 0-40ºC, Humidity ≤80% RH, no corrosive gases, no strong airflow disturbance;
2. Water Supply Requirements: Clean, non-corrosive, water pressure 0.1-0.3 MPa, water consumption 2-5 L/min, temperature ≤25ºC;
3. Gas Supply Requirements:
High-purity nitrogen gas (process protective gas): Purity >99.999%, working pressure 0.1-0.2 MPa, consumption 2-6 m³/h;
Dry, clean, oil-free compressed air (conveyance gas): Inlet pressure 0.4-0.8 MPa;
4. Ventilation System: Non-contact connection to user exhaust system, exhaust capacity >10 m³/h;
5. Floor Requirements: Level, no significant vibration, load-bearing capacity >500 kg/m²;
6. Power Supply: Capacity >35 kVA, 3-phase 5-wire, AC 380 V, frequency 50 Hz. Live wires: Yellow, Green, Red; Neutral wire: Blue; Ground wire: Yellow-green;
7. Installation Space: 3000×1500×3000 mm (D×W×H), installation area >5 m².